Improvements in the mechanical structure of the linear switched reluctance motor

摘要

In semiconductor manufacturing, wire bonding of chips and surface mount technology process require precise robotic linear motion. Traditionally, X-Y sliding tables driven by permanent magnet rotary motors, ball-screw and belt are used. However, they have position accuracy problem due to ball-screw backlash. Since motors and high precision grade ball-screws are expensive, high manufacturing cost is another disadvantage. Low reliability results from complex mechanical alignment and low ball-screw lifetime.